1966/5/12 Zenkyo Corporation was founded at Kanda, Chiyoda, Tokyo, with 500,000yen as the capital fund, manufacturing of the processed goods and molding goods of physiological chemistry, medical tools, and synthetic resin. 1968/3 Increased capital fund to 1,250,000yen 1969〜 Produced and sold Semiconductor Peripheral equipment 1976/6 Constituted main factory at Ukima, Kita, Tokyo 1978 Published Horizontal Quartz pipe cleaning system as the first product, dealing with leadframe automatic cleaning and designing, manufacturing, and Installation construction of the cleaning equipment related semiconductor, such as Mask cleaning system. 1980/11 Increased capital fund to 5,000,000yen 1985/5 Increased capital fund to 10,000,000yen 1986/11 Constituted Saitama Branch, which Clean room fully furnished, at Hikawa-cho, Toda, Saitama 1990/4 Increased capital fund to 50,000,000yen Introduced CAD system 1992〜 Development and sales of Vertical quartz pipe cleaning equipment 1993〜 Development of the network for CAD system 1996〜 Development and sales of Slurry providing system for CMP system Co-experiment of Function water cleaning system and it’s production with trust started. 1997〜 Co-experiment of 300 phi wafer grading and gauging machine, and Surface form measuring machine started. 1988〜 Started to develop and sell Pitch change transfer system. (Under an application of the patent) Started to develop and sell Optical fiber mother material manufacturing machine. (Under an application of the patent) Started to develop and sell Full automatic etching machine. Displayed to Semicon Taiwan 1998. 1999〜 Started to develop and sell Wafer storage box. (Under an application of the patent) Displayed to Semicon Japan 1999. 2000〜 Started to develop and sell 300 phi wafer Cassette-less cleaning machine. Displayed to Semicon Taiwan 2000. 2001〜 Constructed the first Incorporation local area network. 2002〜 Constructed the second Incorporation local area network. Started application of Optical fiber network.